CALIBRATION STANDARD FOR MICROROUGHNESS MEASURING INSTRUMENTS
CALIBRATION STANDARD FOR MICROROUGHNESS MEASURING INSTRUMENTS
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Calibration standard for microroughness measuring instruments
Calibration standard for microroughness measuring instruments
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Method of image enhancement for the coherence probe microscope...
Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology
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Arrangement and method for calibrating optical line shortening...
Inventor: Ziger, David;Leroux, Pierre Applicant: Assignee: Philips Semiconductor, Inc. Patent Number: 06301008 06301008B1 06301008 B1 06,301,008
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Contamination control for embedded ferroelectric device...
Luigi Applicant: Assignee: Agilent Technologies, Inc.;Texas Instruments, Inc. Patent Number: 06709875 06709875B2 06709875 B2 06,709,875 06,709,875B2
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