Voice Coil Actuators And Motors Patents Results - GlobalSpec

Free Registration

Download Engineering Toolbar

GlobalSpec Home

We found these Patents Results for: Voice Coil Actuators And Motors

Engineering Patents: 1 - 4 of 4

Engineering Web®

Products & Services

Part Number Search

Engineering News

Application Notes

Material Properties

Patents

Standards

PROJECTION EXPOSURE APPARATUS from the exposure apparatus body (SP) via actuators, such as air mounts (14A, 14B) and voice coil motors (VCM) (12A, 12B, 13A, 13B), a control unit View Patent Detail from MicroPatent
Wafer stage with magnetic bearings freedom by electromagnetic actuator devices which are preferably voice coil motors extending between the coarse stage and the high accuracy stage. View Patent Detail from MicroPatent
WAFER STAGE WITH MAGNETIC BEARINGS freedom by electromagnetic actuator devices which are preferably voice coil motors (12, 14) extending between the coarse stage (18) and the high View Patent Detail from MicroPatent
Compact high resolution interferometer with short stroke... The drive mechanism may comprise linear actuators, such as voice coil motors, or the like. View Patent Detail from MicroPatent

Home \| About GlobalSpec \| Advertise With Us \| Site Map \| Top Categories \| Terms of Use
Privacy Policy \| Link To Our Site \| Submit a Site \| Recommend This Site

©1999-2008 GlobalSpec. All rights reserved. GlobalSpec, the GlobalSpec logo, SpecSearch, The Engineering Search Engine and The Engineering
Web are registered trademarks of GlobalSpec, Inc. The Engineering Toolbar and DesignInfo are service marks of GlobalSpec, Inc.
No portion of this site may be copied, retransmitted, reposted, duplicated or otherwise used
without the express written permission of GlobalSpec Inc. 350 Jordan Rd, Troy, NY, 12180